000			00344nam a2200145Ia 4500
008			241124s9999 xx 000 0 und d
020			_a9788126532605
100			_aMay, Gary S.
245		0	_aFundamentals of Semiconductor Fabrication
245		0	_cSze, Simon M.
260			_bWiley India
260			_c2004
300			_a305
942			_cBK
999			_c15548 _d15548