| 000 | 00374nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 241124s9999 xx 000 0 und d | ||
| 020 | _a978-0-19-808480-8 | ||
| 100 | _aCampbell, Stephen A. | ||
| 245 | 4 | _aThe Science and Engineering of Microelectronic Fabrication | |
| 250 | _a2nd | ||
| 260 | _bOxford University Press | ||
| 260 | _c2001 | ||
| 300 | _a603 | ||
| 942 | _cBK | ||
| 999 |
_c15663 _d15663 |
||