| 000 | 00358nam a2200145Ia 4500 | ||
|---|---|---|---|
| 008 | 241124s9999 xx 000 0 und d | ||
| 020 | _a0-8493-0826-7145 | ||
| 100 | _aMadou, Marc J | ||
| 245 | 0 | _aFundamentals of Microfabrication: The Science of Miniaturization | |
| 250 | _a2nd | ||
| 260 | _bCRC Press | ||
| 260 | _c2002 | ||
| 300 | _a723 | ||
| 942 | _cBK | ||
| 999 |
_c15744 _d15744 |
||